CMP Products

Our latest innovation is PuRa, a solid CMP that offers greater planarity and stability. WestPad and WestFilm product lines are TWI’s most established and demonstrate our commitment to providing the products and legacy tools that our long-term customers require. 

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Chemical Mechanical Planarization

PuRa represents TWI’s newest and most advanced innovation in CMP technology, using electroscopes to modulate the surface topography of the pads to meet each application’s unique performance needs. It is the first in a range of products that will be expanded over time.

PuRa

  • PuRa

    The PuRa product line is a specially-designed, solid pad that creates a unique stability of the process and delivers similar texture throughout product lifetime. Because the product is translucent, it allows the customer to identify any contaminants, lowering defectivity and improving consistency in end-point detection. It provides the solution to building levels on flat chips, which significantly improves yields. PuRa offers a high degree of customization as the customer can choose the material that goes into the solid pad to vary the level of hardness, able to meet any modern CMP requirement.

WestPad

  • WestPad

    The WestPad product line is one of a very few proven to be effective for a tungsten CMP process. It enables stable tungsten processes and its hardness ensures better planarity. It is particularly cost-effective due to its production-worthiness and durability. The hardness of the non-woven material used in WestPad can be adjusted based on the process for which it will be used

WestFilm

  • WestFilm

    Designed to be used as backing film on a CMP polishing head, the WestFilm product line provides an effective buffer, preventing the wafer from being scraped or shifting during polishing. It uses superior technology that offers customers customized, improved precision and alignment at more competitive pricing. TWI’s technology allows customers to customize WestFilm by specifying the necessary hole size and layouts, which allows us to offer our customers a wide range of solutions to fit their industry requirements